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Microelectromechanical or microelectronic and microelectromechanical systems and …. .a flexible polymer tube lab-chip integrated with physical and biochemical sensor modules mounted on a flexible spiral structure for measuring physiological. .application of micro scanning laser doppler microsensors mems and smart devices pdf vibrometer for vibrational velocity and resonance frequency measurement on micro electro mechanical devices (mems). also written as micro-electro-mechanicalmicroelectromechanical systems (mems.

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Microelectromechanical systems (mems microelectromechanical or microelectronic and microelectromechanical systems and …. .a flexible polymer tube lab-chip integrated with physical and biochemical sensor modules mounted on a flexible spiral structure for measuring physiological. .application of micro scanning laser doppler vibrometer for vibrational velocity and resonance frequency measurement on micro electro mechanical microsensors mems and smart devices pdf devices (mems). also written as micro-electro-mechanical.